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Dual Beam Robot in Action

FEI 1265 interface
TSS Microscopy

Dual Beam Robot in Action

Posted

August 23 2017

At TSS Microscopy, we work with many different types of microscopes.  One of our favorites is the very flexible 300mm dual beam.  TSS has supplied numerous 300mm dual beam around the world.  One of the key components of the wafer dual beam is introduction of the wafer into the system.  The robot loading can be very complex and takes a high level of knowledge to remanufacture and calibrate.  In this video, you will get a taste of what it looks like to be a wafer loading into a 300mm dual beam.  Crank up the volume and enjoy the ride!

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