(TSS#4754) This 2005 Expida 1285, Defect Analyzer (DA) 300 DualBeam is for in-fab defect analysis. Includes installation, operational training and 90-day warranty.

• Electron source Schottky FEG, 200v–30kV
• In lens SE and BSE detector
• Ion source Ga 69/71 LMIS, 5–30kV
• Magnum Ion column: 21nA beam current
• CDEM
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis motorized comp-eucentric stage
• XYZ: 305 x 305 x 10 mm
• Tilt: – 10° to + 60°, Rotation: n x 360°
• Dual 300mm FOUPs
• Chamber scope for real time observation
• Gas Injection System (GIS): Max 4 injectors 2 included, chemistry of choice
• Vacuum System, oil free consisting of Column IGP x 3, air cooled Turbo and dry PVP

• Includes installation & operational training (North America)*
* Installation outside of North America will be quoted.
• 90 day warranty

Additional Options Including:
• GIS chemistries
• Infrared camera for backside editing
• EDX
• Plasma Cleaner