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Overview
(TSS#7344) This pre-owned Helios NanoLab 600S DualBeam can be used for TEM lamella prep, circuit edit front & back, defect/failure analysis, nanofabrication, nanoprototyping and MEMS. It has been Remanufactured to original OEM specification and includes:
- Elstar electron column
- Electron beam voltage from 350v–30kV
- Sidewinder Ion column
- Ion beam voltage: 0.5 to 30kV, beam current 1pA to 21nA
- TLD, ETD, detectors
- Windows OS and FEI xT
- Piezo, compucentric stage
- Specimen Coverage: 150mm diameter
- In-chamber CCD
- Plasma Cleaner
- Gas Injection System: Max 4 injectors 1 included, Pt or W
- Vacuum System, oil free consisting of 3 IGPs, water-cooled turbo and dry PVP
- Includes installation and operational training in North America*
- 6-month warranty
Available Options Include:
- STEM (STEM detector and QL STEM hardware)
- Omniprobe 200
- Additional GIS chemistries (IEE, EE, C, Pt, W, H20, IDEP)
- HT Sidewinder (65nA)
- 6-inch wafer holder
- Integrated EDS and EBSD detectors
*Installation outside of North America will be quoted
Included With Instrument
Basic Operational Training
180 Day Warranty
Optional Upgrades and Services
Annual Service Contracts
Preventive Maintenance
On Demand Service