(TSS#6164) This Thermo Fisher Scientific Helios NanoLab 1200 DualBeam can be used for TEM lamella prep, circuit edit, defect/failure analysis, and MEMS. This Helios NanoLab 1200 includes:

• Elstar UHR Electron column
• Sidewinder Ion column
• TLD, CDEM detectors
• Windows OS and FEI xT
• 5 axis (X, Y, Z, R, Tilt), 300 mm piezo, compucentric stage
  • 300/200 mm wafers
• Gas Injection System: Max 4 injectors, 1 included, Pt or W
• Vacuum System, oil free consisting of 3 IGPs, water-cooled turbo and dry PVP
• Includes installation and operational training in North America*

Additional Options:

• Additional GIS chemistries (IEE, EE, C, Pt, W, H20, IDEP)
• Omniprobe Nanomanipulator
• Plasma Cleaner
• Integrated EDS detector

*Installation outside of North America will be quoted separately