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Overview
(TSS#2111) This 2002 Strata 235 DualBeam can be used for TEM lamella prep, circuit edit front & back, defect/failure analysis, nanofabrication, nanoprototyping and MEMS.
- SFEG Siron Electron Column
- Electron beam voltage: 500V to 30kV
- Magnum Ion Column
- Ion beam voltage: 30kV, beam current 1pA to 21nA
- TLD, ETD, CDEM detectors
- Windows OS and FEI xP
- Five-axis motorized compucentric stage
- In-chamber CCD
- Gas Injection System: Max 4 injectors, 1 included, Pt or W
- Vacuum System, oil free consisting of 3 IGPs, water-cooled turbo and dry PVP
- Includes installation and operational training in North America*
Additional Options:
- Additional GIS chemistries (IEE, EE, C, Pt, W, H20, IDEP)
- Omniprobe Nanomanipulator
- Plasma Cleaner
- Integrated EDS and EBSD detectors
*Installation outside of North America will be quoted separately
Included With Instrument
90 Day Warranty
Basic Operational Training
Optional Upgrades and Services
Annual Service Contracts
Preventive Maintenance
On Demand Service