FEI XL30

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Overview

FEI XL30

The XL-30 includes:
• Electron column with Tungsten Emitter, 1 to 30kV
• Everhart-Thornley SEC detector
• Windows OS and FEI UI; TSS networking computer to make IT happy
• Five-axis compucentric stage
• Motorized XYZ: 50 x 50 x 20 mm
• Manual T: – 10° to + 60°, Motorized R: n x 360°
• Chamber scope for real time observation
• Vacuum System: air cooled turbo with mechanical PVP

• Includes installation & operational training (North America)*
* Installation outside of North America will be quoted.
• 90 day warranty

Additional Options Include:
• BSE
• EDX
• Plasma Cleaner
• Omniprobe

Included With Instrument

Training Basic Operational Training 90 Day Warranty 90 Day Warranty

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service
Maintenance and Servicing

Need Information On Maintenance or Servicing?

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