(TSS#3817) This pre-owned FEI Altura 855 Dualbeam offers the ultimate tools for defect characterization, failure analysis, and TEM sample preparation on patterned and unpatterned wafers, as well as piece parts. Advanced software automation enables automated TEM sample preparation and high throughput ion milling, all designed to increase productivity and provide rapid feedback to the manufacturing process. It has been remanufactured to original OEM specifications and includes:

• SFEG Sirion Electron Column
• Electron beam voltage from 500v to 30kV
• Sidewinder Ion column
• Ion beam current from 1pA to 21nA
• TLD and CDEM detectors
• Windows OS and FEI xP
• Five-axis motorized comp-eucentric stage with 200mm wafer load lock
• XYZ: 205 x 205 x 10 mm, Tilt: – 10° to + 60°, Rotation: n x 360°
• In-chamber CCD
• Gas Injection System (GIS): Max 4 injectors 1 included, Pt or W
• Vacuum system, oil free consisting of 3 IGPs, air-cooled turbo and dry PVP

• Includes installation and operational training in North America*
• 90-day warranty

Additional Options Include:

• Omniprobe Nanomanipulator
• Additional GIS Chemistries
• Plasma Cleaner
• Integrated EDS and EBSD detectors