(TSS#6561) This Expida 1255 Dualbeam can be used for TEM lamella prep, circuit edit, defect/failure analysis, and MEMS. It has been remanufactured to original OEM specifications and includes:

• SFEG Sirion Electron Column
• Electron beam voltage: 500V to 30kV
• Sidwinder Ion Column
• Ion beam voltage: 30kV, beam current: 1pA to 21nA
• TLD, CDEM detectors
• Windows OS and FEI xP
• Five-axis piezo compucentric stage
• XYZ: 305 x 305 x 12 mm, Tilt: – 5° to + 60°, Rotation:  n x 360°
  • 150, 200 or 300 mm wafers
• In-chamber CCD
• Gas Injection System: Max 4 injectors, 1 included, Pt or W
• Vacuum System, oil free consisting of 3 IGPs, water-cooled turbo and dry PVP
• Includes installation and operational training in North America*

Additional Options:

• Additional GIS chemistries  (IEE, EE, C, Pt, W, H20, IDEP)
• Omniprobe Nanomanipulator
• Plasma Cleaner
• Integrated EDS detector

*Installation outside of North America will be quoted separately