FEI Helios NanoLab 600

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Overview

FEI Helios NanoLab 600

(TSS#7344) This pre-owned Helios NanoLab 600S DualBeam can be used for TEM lamella prep, circuit edit front & back, defect/failure analysis, nanofabrication, nanoprototyping and MEMS. It has been Remanufactured to original OEM specification and includes:

  • Elstar electron column
  • Electron beam voltage from 350v–30kV
  • Sidewinder Ion column
  • Ion beam voltage: 0.5 to 30kV, beam current 1pA to 21nA
  • TLD, ETD, detectors
  • Windows OS and FEI xT
  • Piezo, compucentric stage
  • Specimen Coverage: 150mm diameter
  • In-chamber CCD
  • Plasma Cleaner
  • Gas Injection System: Max 4 injectors 1 included, Pt or W
  • Vacuum System, oil free consisting of 3 IGPs, water-cooled turbo and dry PVP
  • Includes installation and operational training in North America*
  • 6-month warranty

Available Options Include:

  • STEM (STEM detector and QL STEM hardware)
  • Omniprobe 200
  • Additional GIS chemistries (IEE, EE, C, Pt, W, H20, IDEP)
  • HT Sidewinder (65nA)
  • 6-inch wafer holder
  • Integrated EDS and EBSD detectors

*Installation outside of North America will be quoted

Included With Instrument

Training Basic Operational Training 180 day warranty from TSS Microscopy 180 Day Warranty

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service
Maintenance and Servicing

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