FEI XL30

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Overview

FEI XL30

(TSS#1237) This XL30 FEG includes:
• Electron column with Schottky field emitter, 1 to 30kV
• Everhart-Thornley secondary detector
• Windows OS and FEI UI;  TSS networking computer to make IT happy
• Five-axis comp-eucentric stage
• Motorized XYZ: 50 x 50 x 20 mm
• Manual T: – 10° to + 60°, Motorized R: n x 360°
• Chamber scope for real time observation
• Vacuum System: air cooled turbo with mechanical PVP

• Includes installation & operational training (North America)*
* Installation outside of North America will be quoted.
• 90 day warranty

Additional options include:
• BSE
• EDX
• Plasma Cleaner
• Omniprobe

Included With Instrument

90 Day Warranty 90 Day Warranty Training Basic Operational Training

Optional Upgrades and Services

Annual Service Contracts Available Annual Service Contracts Preventive Maintenance Visits Preventive Maintenance On Demand Service Contacts On Demand Service
Maintenance and Servicing

Need Information On Maintenance or Servicing?

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